SORTER
Wafer Handling
Cleanroom robot and aligner using direct-drive servo motors enable high throughput. Loadports can be equipped with various units on the front, rear, and sides of the frame, and can interface directly with OHT and stocker systems.
 | Compatible with 200 mm and 300 mm wafers |
| Multiple pick-and-place options available |
| Reads wafer top and bottom IDs |
| Compatible with OHT and Stocker |
| Optional edge detection feature |
