ABXY
Precision Control
The ABXY-ZT4 Series is a 6-DOF air-bearing and mechanical motion platform engineered for the rigorous demands of back-end exposure, wafer inspection, dicing, and annealing.
 | Air bearings on X/Y axes for smooth motion |
| T-axis: micro-rotational adjustment for leveling |
| Dual-drive stepper axes with passive damping modules |
| Z axis: fast and precise focusing motion |
